Yield Improvement Solutions
In addition to implementing complex yield improvement projects, our staff has published technical papers on how to use innovative, out-of-the-box automation to improve yield in factories
Yield Improvement Solutions
Add SECS/GEM on Old/Legacy Equipment Through EIGEMBox
Add SECS/GEM (automation) capability on existing or legacy equipment through our patent-pending product EIGEMBox
Advanced process Control (APC)
With Decades of Fab & Assembly operations experience, EINNOSYS has developed various APC solutions to collect & analyze metrology data & adjust process recipes and parameters automatically
Fault Detection & Classification
eInnoSys has successfully implemented several Fault Detection & Classification (FDC) projects at various fabs.
Yield Management Solutions
- Host applications or station controllers that download and/or select recipes upon barcode or RFID scanning of lot boxes and remotely starting process
- Collection and analysis of alarms, events and other critical process parameters from equipment through SECS/GEM or other means and correlating with other data such as that from MES or from other equipment
- For Wafer FABs, correlating end-to-end wafer data: From epitaxial - inline process - inline metrology - electrical testing -Final Test
- Use feedback and feed-forward approach to feed metrology data to process equipment to improve yield
